The purity of alumina ceramic polishing plate discs has a significant impact on the process, mainly in the following areas:
1. Polishing effect:
- High purity alumina wafer polished discs provide a more uniform polished surface with fewer surface defects and impurities.
- The use of high-purity aluminum oxide polishing disc polishing semiconductor wafers can reduce the main surface of the wafer scars or contamination, reduce the introduction of metal ions, improve the utilization of silicon wafers and polishing quality.
2. Product quality:
- The high purity of alumina ceramic polished plate discs means that their impurity content is low, which can reduce the contamination of the wafer surface caused by impurities during the polishing process.
- High purity polishing discs help to maintain the purity of the product, ensuring stable performance of semiconductor devices and meeting stringent process requirements.
3. Process stability:
- The coefficient of thermal expansion of high-purity alumina polishing discs is similar to that of silicon, which helps to reduce the thermal stress caused by temperature changes and improve process stability.
- Stable process helps to reduce the defective rate in the production process and improve the production efficiency.
4. Chemical stability:
- High purity alumina has excellent chemical stability and is able to maintain its properties and structure in a wide range of chemical environments.
- This makes high purity aluminum oxide polishing discs less susceptible to corrosion or wear during the polishing process and maintains a longer service life.
5. Economic benefits:
- While the initial cost of a high-purity alumina polishing disc may be high, its excellent properties and long service life reduce the overall cost of production.
- In addition, high purity polishing discs can improve product quality and process stability, reduce the defective product rate, and further improve economic benefits.
6. Impact of technical indicators:
- According to the referenced article, polishing discs of high purity alumina (99.7%-99.9%) have excellent physical and chemical properties, such as high mechanical strength, high wear resistance, high electrical insulation, high chemical stability, good heat and corrosion resistance.
- These technical indicators directly affect the effect of the polishing process and product quality.
Alumina ceramic wafer polished plate disc purity has an important impact on the process, high purity polishing disc can improve the polishing effect, product quality and process stability, while reducing the overall production cost. Therefore, in the semiconductor manufacturing process, the choice of high purity alumina polishing discs is important to ensure product quality and improve production efficiency.
Post time: Jul-14-2024